发明名称 DEPOSITION DEVICE AND DEPOSITING METHOD
摘要 <p>A deposition device and a depositing method are disclosed. The deposition device includes: a seating part wherein a substrate is seated; a lift pin installed in the seating part to support the substrate and to lift or lower the substrate; a substrate holder installed within the seating part to be moved up and down to adhere to and support the substrate; and a mask holder to support a mask at a distance from the substrate. The substrate holder includes: an electrostatic chuck for coming in contact with the substrate to adhere to and support the substrate; and a magnetic part placed on the electrostatic chuck to make the substrate adhere to the mask.</p>
申请公布号 KR20150077998(A) 申请公布日期 2015.07.08
申请号 KR20130167011 申请日期 2013.12.30
申请人 SAMSUNG DISPLAY CO., LTD. 发明人 NOH, SOK WON;PARK, KOOK CHOL
分类号 C23C14/24;C23C14/04 主分类号 C23C14/24
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