发明名称 APPARATUS FIRING CERAMIC SUBSTRATE
摘要 Disclosed is a ceramic substrate firing apparatus. Provided is the ceramic substrate firing apparatus, which comprises: a firing furnace for supplying heat to a ceramic substrate by accommodating a plurality of ceramic substrates therein; a plurality of setters installed as spaced in a vertical direction inside the firing furnace to support a lower surface of the ceramic substrate; a pillar for supporting the setters to maintain the interval between the setters; and a gas input unit formed in the firing furnace to supply a reducing gas to the firing furnace wherein a plurality of through-holes are formed on the pillar so that the reducing gas passes through.
申请公布号 KR20150079145(A) 申请公布日期 2015.07.08
申请号 KR20130169186 申请日期 2013.12.31
申请人 SAMSUNG ELECTRO-MECHANICS CO., LTD. 发明人 LEE, TAEK JUNG;KIM, YONG SUK;CHANG, BYEUNG GYU
分类号 C04B35/64;F27D3/12 主分类号 C04B35/64
代理机构 代理人
主权项
地址