| 摘要 |
An X-ray analyzer comprises an incident side arm 3, a receiving side arm 4, an X-ray source 7, an incident side slit 8, sample stage 2 and a one-dimensional X-ray detector 11 possessing intensity positional resolution on a straight line. The adjustment method comprises an adjustment step in which a 00 position of the rotation of the receiving-side arm and a position of the angle of diffraction 2θ are aligned, a Zs-axis adjustment step in which the position of the incident-side slit along a direction orthogonal to the centerline of the incident X-rays from the source is adjusted 19, and a θ adjustment step in which the centerline of X-rays incident upon the sample from the source and the surface of the sample are adjusted to be parallel. In the 2θ adjustment step, the Zs-axis adjustment step, and the θ adjustment step, the capability for X-ray intensity positional resolution upon a straight line possessed by the one-dimensional X-ray detector is used to perform the respective adjustments. |
