发明名称 保持装置、それを用いたインプリント装置および物品の製造方法
摘要 A holding apparatus of the present invention for holding a mold, includes a chuck configured to attract the mold to hold the mold, including a plurality of holding units each of which is configured to hold the attracted mold, and including a support configured to support the plurality of holding units; and an actuator supported by the support and deforms the mold by applying a force. At least one of the holding units is supported by the support unit so as to be displaceable in the direction of the force applied by the actuator.
申请公布号 JP5744548(B2) 申请公布日期 2015.07.08
申请号 JP20110020494 申请日期 2011.02.02
申请人 キヤノン株式会社 发明人 鳥居 弘稔
分类号 H01L21/027 主分类号 H01L21/027
代理机构 代理人
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