COPOLYMER FORMULATIONS, METHODS OF MANUFACTURE THEREOF AND ARTICLES COMPRISING THE SAME

摘要

Disclosed in the present invention is a method for generating uniformly spaced channels on a semiconductor substrate by arranging a mat composition including a random copolymer including a first acrylate unit and a second unit on a surface of the semiconductor substrate (Here, the copolymer does not include polystyrene or polyepoxide); cross linking a random copolymer; arranging a brush backfill composition on the substrate for the brush backfill composition and the mat composition to be alternating; arranging a block copolymer going through self assembly on the brush backfill composition and the mat composition; and etching the block copolymer.