发明名称 太陽電池用基板の表面処理方法
摘要 <p>PROBLEM TO BE SOLVED: To provide a method of performing surface treatment of a substrate for solar cell, especially of a pseudo single crystal substrate, effectively regardless of the type and directivity of crystal.SOLUTION: In a method of performing surface treatment of a substrate for solar cell, a pyramid structure is formed on the surface of a substrate by performing a first wet etching step, a reactive ion etching step, and a second wet etching step. Such a pyramid structure contributes to enhancement of light absorption efficiency of a solar cell, by lowering the optical reflectance. Efficiency of a solar cell can be enhanced by performing surface treatment of a pseudo single crystal substrate effectively, regardless of the type and directivity of crystal.</p>
申请公布号 JP5745598(B2) 申请公布日期 2015.07.08
申请号 JP20130232821 申请日期 2013.11.11
申请人 发明人
分类号 H01L31/0236;H01L31/068 主分类号 H01L31/0236
代理机构 代理人
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