发明名称 半導体チップテスト方法、半導体チップテスト装置
摘要 <p>A semiconductor chip testing method includes: (a) testing the electrical characteristics of each of semiconductor chips in the form of wafers or in the form of chips formed on a predetermined number of semiconductor wafers having certain relationship, and determining if the semiconductor chip is non-defective or defective; (b) calculating a percentage of semiconductor chips determined to be defective as a fraction defective for each of wafer addresses based on determination results about the semiconductor chips on the predetermined number of semiconductor wafers, the wafer addresses indicating the respective positions of the semiconductor chips on the semiconductor wafers; and (c) changing a determination result about a semiconductor chip determined to be non-defective to defective, the semiconductor chip being at a wafer address determined to have a fraction defective at a threshold or higher than the threshold.</p>
申请公布号 JP5745981(B2) 申请公布日期 2015.07.08
申请号 JP20110209160 申请日期 2011.09.26
申请人 发明人
分类号 H01L21/66;G01R31/26 主分类号 H01L21/66
代理机构 代理人
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