PRESSURE SENSOR USING FABRY-PEROT INTERFEROMETER

摘要

The present invention relates to a device using the Fabry-Perot interferometer for measuring pressure. The device includes an optical fiber providing a path for light delivered through a light source; a lens forming a first reflecting surface by being attached to a section formed at an end of the optical fiber; a glass ferrule surrounding the optical fiber and the lens; and a diaphragm attached to an upper surface of the glass ferrule, deformed according to external pressure, and providing a second reflecting surface. A through a part, formed of an air layer separating the first and second reflecting surfaces, is formed in the glass ferrule. When light is reflected from the first and second reflecting surfaces, the light reflected from the second reflecting surface is focused on the first reflecting surface by the lens. Therefore, as an optical signal, reflected after penetrating the reflecting surfaces of the optical fiber, is focused by the lens, optical attenuation is reduced, and thus, more precise pressure is able to be measured.