AUXILIARY EQUIPMENT FOR WAFER BREAKING APPARATUS

摘要

Auxiliary equipment for a wafer breaking apparatus according to the embodiment includes: a sample wafer where first and second tapes are attached to the bottom side and the upper side of a wafer body and at least one groove for breaking is formed between the wafer body and the second tape; a push stick which supports the sample wafer; and a breaking base which touches the first tape of the sample wafer supported by the push stick, applies a repulsive force against a pressure applied to the push stick to the groove, and breaks the sample wafer.