| 摘要 |
<p>[Problem] The purpose of the invention is to provide a physical quantity sensor with particularly high sensitivity and outstanding detection stability. [Solution] Formed in mutual detachment on a silicon substrate are: anchor sections (6, 7); a movable section (2); and support sections (3, 4, 13, 14) that freely rotatably connect the anchor sections and the movable section through spring sections. A pair of first anchor sections is placed on both front/back-direction sides of the movable section (2), and a first support section that extends in the left/right direction is freely rotatably connected to each member of the pair of first anchor sections. Second anchor sections are placed in the left/right direction relative to the first anchor sections, and a second support section that extends in the left/right direction is freely rotatably connected to each member of the pair of second anchor sections. A first foot section is formed facing leftward on the first support section, and a second foot section is provided facing rightward on the second support section.</p> |
