发明名称 レーザビーム照射装置及び該レーザビーム照射装置を備える基板密封装置
摘要 <p>A laser beam irradiation apparatus comprises: a laser oscillator; an optical fiber for transmitting a laser beam oscillated by the laser oscillator; an optical tube for accommodating an end of the optical fiber, and for performing a rectilinear motion on a plane perpendicular to a direction in which the laser beam is irradiated; and a pair of piezoelectric transducers disposed between the optical tube and the end of the optical fiber, and having first ends supporting the optical fiber. Each piezoelectric transducer performs a rectilinear reciprocating motion in a direction perpendicular to the other piezoelectric transducer on a plane perpendicular to the direction in which the laser beam is irradiated.</p>
申请公布号 JP5745892(B2) 申请公布日期 2015.07.08
申请号 JP20110041788 申请日期 2011.02.28
申请人 发明人
分类号 B23K26/08;B23K26/06 主分类号 B23K26/08
代理机构 代理人
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