APPARATUS FOR TRANSFERRING SUBSTRATE

摘要

According to one embodiment of the present invention, the present invention relates to a substrate transfer apparatus stably transfer a substrate using a magnetic force. According to the present invention, the substrate transfer apparatus comprises: a substrate stage having a substrate mounting unit; a first guide block disposed in a first end part of the substrate stage and having a first magnetic force generation unit; a second guide block disposed in a second end part of the substrate stage and having a second magnetic force generation unit; a first guide rail having a third magnetic force generation unit; and a second guide rail having a fourth magnetic force generation unit.