发明名称 |
MULTIPLE PROBE DETECTION AND ACTUATION |
摘要 |
A method of detecting the positions of a plurality of probes. An input beam is directed into an optical device and transformed into a plurality of output beamlets which are not parallel with each other. Each output beamlet is split into a sensing beamlet and an associated reference beamlet. Each of the sensing beamlets is directed onto an associated one of the probes with an objective lens to generate a reflected beamlet which is combined with its associated reference beamlet to generate an interferogram. Each interferogram is measured to determine the position of an associated one of the probes. A similar method is used to actuate a plurality of probes. A scanning motion is generated between the probes and the sample. An input beam is directed into an optical device and transformed into a plurality of actuation beamlets which are not parallel with each other. |
申请公布号 |
EP2891117(A1) |
申请公布日期 |
2015.07.08 |
申请号 |
EP20130759283 |
申请日期 |
2013.08.28 |
申请人 |
INFINITESIMA LIMITED |
发明人 |
HUMPHRIS, ANDREW |
分类号 |
G06Q10/04;B82Y35/00;G01N29/036;G01Q20/02;G01Q70/06;G03F7/20;G11B9/14 |
主分类号 |
G06Q10/04 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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