发明名称 電界効果トランジスタ及びその製造方法
摘要 <p><P>PROBLEM TO BE SOLVED: To provide a field-effect transistor having high reproducibility of transistor characteristics, high speed, and high power, and to provide a method of manufacturing the same. <P>SOLUTION: A field-effect transistor 10 comprises a diamond substrate 11, a second electrode 13 and a third electrode 14 that are formed apart from each other on one surface 11a side of the diamond substrate 11, and a first electrode 15 formed between the two electrodes 13 and 14 so as to be spaced apart from the electrodes. A group III nitride semiconductor layer 12 is provided between the first electrode 15 and the diamond substrate 11, and a hole conduction channel region 16 is formed in a region near an interface 17 between the diamond substrate 11 and the group III nitride semiconductor layer 12. <P>COPYRIGHT: (C)2012,JPO&INPIT</p>
申请公布号 JP5747245(B2) 申请公布日期 2015.07.08
申请号 JP20100231352 申请日期 2010.10.14
申请人 发明人
分类号 H01L21/338;H01L21/205;H01L21/28;H01L29/778;H01L29/812 主分类号 H01L21/338
代理机构 代理人
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