| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a treatment facility which has a high degree of freedom with regard to the layout arrangement of internal regions, and which is provided with a plurality of treatment rooms for treating materials-to-be-treated to obtain treated materials, and a conveyance region wherein materials-to-be-conveyed comprising materials-to-be-treated or treated materials are received and delivered from and to the treatment rooms. <P>SOLUTION: Distribution floors 2, wherein the conveyance region is formed for conveying a conveyance container C, are provided below treatment floors 1 wherein a plurality of treatment rooms 21 are arranged in a planar manner, and delivery openings 22 are formed on floor surfaces 11 between the treatment floors 1 and the distribution floors 2, and the conveyance containers C are conveyed and delivered to and from the treatment floors 1 and the distribution floors 2 via the delivery openings 22 by conveyance cars 5 which travel on the distribution floors 2. Further, a slide mechanism 55 is arranged to be adjacent to an opening/closing door 22b formed laterally to the delivery opening 22 on the treatment floor 1, and the conveyance container C is received and delivered from and to the conveyance car 5 via the opening/closing door 22b. <P>COPYRIGHT: (C)2012,JPO&INPIT</p> |
