| 摘要 |
<p>The present invention discloses a multi-directional system for transferring wafers, which allows load ports installed on the wafer transferring apparatuses facing each other, to share a support stand, thereby maximizing space availability for a space where the wafer transferring apparatuses are installed and reducing apparatus installation costs. The multi-directional system comprises: a pair of wafer transferring apparatuses having door parts arranged to face each other; load ports installed on the wafer transferring apparatuses facing each other, and a wafer cassette included therein to store wafers. The load ports facing each other include the support stand, which is horizontally protruding therefrom to support the wafer cassette while sharing the support stand. The support stand is installed in such a manner that the support stand can be separated from each of the load ports facing each other.</p> |
