Methods for discretized processing and process sequence integration of regions of a substrate

摘要

The present invention provides methods and systems for discretized, combinatorial processing of regions of a substrate such as for the discovery, implementation, optimization, and qualification of new materials, processes, and process sequence integration schemes used in integrated circuit fabrication. A substrate having an array of differentially processed regions thereon is processed by delivering materials to or modifying regions of the substrate.

主权项

1. A method of discretized processing of substrates, the method comprising:
providing a substrate comprising a first region and a second region; and processing the substrate using a combinatorial technique on different ones of the first region and the second region of the substrate, wherein processing the substrate using the combinatorial technique comprises:
forming a seal between a processing cell and the substrate at the first region,
wherein the processing cell comprises an upper seal,wherein the upper seal comprises a septum, andwherein the processing cell comprises a removable insert, and wherein the removable insert separates the processing cell from the processing fluid while the processing fluid is in contact with the first region of the substrate; anddelivering a processing fluid into the processing cell using a delivery system comprising a probe,
wherein delivering the processing fluid comprises piercing the septum of the upper seal with the probe of the delivery system and flowing the processing fluid through a cavity of the probe,wherein, after delivering the processing fluid into the processing cell, the processing fluid is in contact with the first region of the substrate, andwherein after delivering the processing fluid into the processing cell, the processing fluid is not in contact with the second region of the substrate.