| 摘要 |
<p>The subject of the present invention is to improve the detection accuracy of a polishing end point. A polishing end point detection method polishes a polishing target including a mixed film of a nanocarbon material and a light transmission material, and projects light to the polishing target at the same time (step S102). And then, the polishing end point detection method receives the light reflected from the polishing target (step S103). After that, the polishing end point detection method executes signal processing to the reflected light which is received (step S104). And then, the polishing end point detection method determines the polishing end point based on the result of the signal processing (step S105) and the polishing end point is detected (step S106).</p> |
