发明名称 Optical device with a piezoelectrically actuated deformable membrane shaped as a continuous crown
摘要 An optical device with a deformable membrane (2) including an anchor area (2.3) on a support (1) entrapping a liquid or gas fluid, a central area (2.1) reversibly deformable from a rest position, actuating means for moving the fluid (4) biasing the membrane (2) into an intermediate area between the anchor area (2.3) and the central area (2.1), the actuating means include a piezoelectric continuous crown accommodating several actuators (5.1), this crown surrounding the central area (2.1), the actuating means (5) being anchored to the membrane (2) in at least the intermediate area (2.2), the actuating means (5) and the membrane (2) to which they are anchored, forming at least one piezoelectric bimorph (B), the actuating means (5) radially contracting or extending upon actuation so as to generate a movement of said fluid (4) from the intermediate area (2.2) to the central area (2.1) of the membrane (2) or vice versa, aiming at deforming the central area (2.1) with respect to its rest position.
申请公布号 US9075190(B2) 申请公布日期 2015.07.07
申请号 US201013394641 申请日期 2010.09.14
申请人 Commissariat à l'énergie atomique et aux énergies alternatives 发明人 Moreau Stephane;Bolis Sebastien
分类号 H01L41/09;G02B3/12;G02B3/14;G02B26/08 主分类号 H01L41/09
代理机构 Oblon, McClelland, Maier & Neustadt, L.L.P. 代理人 Oblon, McClelland, Maier & Neustadt, L.L.P.
主权项 1. An optical device, comprising: a support; a deformable membrane including: (i) an anchor area disposed on the support and configured to entrap an amount of liquid or gas fluid that biases the membrane;(ii) a central area configured to be reversibly deformable from a rest position; and(iii) an intermediate area between the anchor area (i) and the central area (ii); and an actuator unit including a single continuous crown that includes a piezoelectric material, wherein the single continuous crown includes a plurality of piezoelectric actuators, each being formed by a pair of electrodes sandwiching the continuous crown, wherein the actuator unit moves the fluid biasing the membrane into the intermediate area (iii), wherein the continuous crown is mounted around the central area (ii) without overlapping the central area (ii), and the actuator unit is anchored to the membrane at least in the intermediate area (iii) thereby forming a piezoelectric bimorph, and wherein the actuator unit radially contracts or extends upon actuation to move the fluid from the intermediate area (iii) to the central area (ii) or from the central area (ii) to the intermediate area (iii), which deforms the central area (ii) from the rest position.
地址 Paris FR
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