Substrate clamping system and method for operating the same

摘要

An electrostatic chuck includes an electrically conductive baseplate and an electrically non-conductive substrate support member disposed on the baseplate. First and second sets of clamp electrodes are disposed within the support member. A power supply system includes a clamp power supply, a center tap power supply, and a baseplate power supply. The clamp power supply generates a positive output voltage and a negative output voltage, each of which is equidistant from a center tap voltage. The positive output voltage is electrically connected to the first set of clamp electrodes. The negative output voltage is electrically connected to the second set of clamp electrodes. The center tap power supply is defined to control the center tap voltage of the clamp power supply. The baseplate power supply is defined to generate a baseplate output voltage independent from the center tap voltage. The baseplate output voltage is electrically connected to the baseplate.

主权项

1. A substrate clamping system, comprising:
an electrostatic chuck including a baseplate and a substrate support member disposed on the baseplate, the baseplate formed of an electrically conductive material, the electrostatic chuck including a first set of clamp electrodes disposed within the substrate support member and a second set of clamp electrodes disposed within the substrate support member; a power supply system including a clamp power supply, a center tap power supply, and a baseplate power supply, the clamp power supply defined to generate a positive output voltage and a negative output voltage, the positive and negative output voltages equidistant from a center tap voltage, the positive output voltage electrically connected to the first set of clamp electrodes, the negative output voltage electrically connected to the second set of clamp electrodes, the center tap power supply defined to control the center tap voltage of the clamp power supply, the baseplate power supply defined to generate a baseplate output voltage independent from the center tap voltage, the baseplate output voltage electrically connected to the baseplate; and a bias resistor electrically connected between a terminal of the clamp power supply at which the negative output voltage is generated and a ground reference potential.