Probe card

摘要

An electrode and wiring can be provided on an FPC board without restriction by a through hole. A probe card in which an FPC board of a probe assembly is fixed to the main board side by a clamp mechanism is provided. The clamp mechanism is provided with a fixing ring fixed to the main board side and on which the FPC board is mounted and a rotating ring screwed into the fixing ring and pressing a peripheral edge portion of the FPC board. In the fixing ring, a pressing ring pressed by screwing of the rotating ring for pressing the peripheral edge portion of the FPC board to the main board side is provided.

主权项

1. A probe card in which an flexible printed circuit (FPC) board of a probe assembly is fixed to a main board side by a clamp mechanism, wherein
the clamp mechanism is composed of a fixing ring fixed to the main board side and on which the FPC board is mounted and a rotating ring screwed into the fixing ring and pressing a peripheral edge portion of the FPC board, and said probe card further comprises: a pressing ring which is mounted in the fixing ring and is pressed by screwing of the rotating ring so as to press a peripheral edge portion of the FPC board to the main board side; a fitting recess portion provided in an inner side of the fixing ring; and a fitting projecting portion provided on an outer side of the pressing ring and allowing movement of the pressing ring in a direction of pressing the FPC board, the fitting projection portion suppressing rotation of the pressing ring through being fitted in the fitting recess portion.