NITRIDE COATING LAYER AND THE METHOD THEREOF

摘要

A method for forming a nitride coating layer is disclosed. According to the present invention, the nitride coating layer, which is a plurality of TiAlSiN coating layers deposited on a substrate, has a concentration gradient for Si content in a plurality of TiAlSiN coating layers because a content of Si in the TiAlSiN coating layer near to the substrate in a thickness direction is less than a content of Si in the TiAlSiN coating layer relatively far from the substrate in the thickness direction.