| 发明名称 | Transmissive-reflective photocathode | ||
| 摘要 | The present invention includes a transmissive-reflective photocathode including a membrane configured to absorb photons from an illumination source via a first surface of the membrane, the membrane further configured to emit photoelectrons in a reflection mode via the first surface, the membrane further configured to emit photoelectrons in a transmissive mode via a second surface, the first surface and the second surface being substantially parallel, and a membrane support structure configured to mechanically secure the membrane, the membrane support structure further configured to provide at least a first pathway between the first surface and free space and a second pathway between the second surface and free space. | ||
| 申请公布号 | US9076639(B2) | 申请公布日期 | 2015.07.07 |
| 申请号 | US201213638124 | 申请日期 | 2012.09.06 |
| 申请人 | KLA-Tencor Corporation | 发明人 | Maleev Ivan |
| 分类号 | H01J40/06;G01J1/44;H01L27/146 | 主分类号 | H01J40/06 |
| 代理机构 | Suiter Swantz pc llo | 代理人 | Suiter Swantz pc llo |
| 主权项 | 1. A photocathode, comprising: a membrane configured to absorb photons from an illumination source via a first surface of the membrane, the membrane further configured to emit photoelectrons in a reflection mode via the first surface, the membrane further configured to emit photoelectrons in a transmissive mode via a second surface, the first surface and the second surface being substantially parallel; and a membrane support structure configured to mechanically secure the membrane, the membrane support structure further configured to provide at least a first pathway between the first surface and free space and a second pathway between the second surface and free space. | ||
| 地址 | Milpitas CA US | ||