发明名称 GATE VALVE AND APPARATUS FOR PROCESSING FLEXIBLE SUBSTRATE INCLUDING THEREOF
摘要 <p>The present invention includes a gate body on which an entrance is formed to input and output a flexible substrate, a gate which is transferred on the gate body and opens or closes the entrance, a sealing part which is arranged on one end of the gate, and a buffer unit which buffers an impact applied to the flexible substrate arranged in the entrance according to the closure of the gate by being supported on the inner side of the gate body to face the sealing part for preventing the substrate arranged on the entrance form being damaged or broken in the closure of the entrance. Thereby, the present invention improves productivity by using a roll-to-roll method and improves the productivity of the substrate by preventing the substrate from being damaged or broken in the closure of the entrance.</p>
申请公布号 KR20150077118(A) 申请公布日期 2015.07.07
申请号 KR20130166015 申请日期 2013.12.27
申请人 LIGADP CO., LTD. 发明人 SON, HYOUNG KYU
分类号 H01L21/3065;H01L21/205;H01L21/67;H01L21/677 主分类号 H01L21/3065
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