发明名称 APPARATUS FOR PROCESSING FLEXIBLE SUBSTRATE AND METHOD OF PROCESSING FLEXIBLE SUBSTRATE USING THE SAME
摘要 The present invention is to provide an apparatus to process a flexible substrate and a method to process the flexible substrate using the same to improve a process speed of the flexible substrate. The apparatus to process the flexible substrate to allow the flexible substrate to be processed in a roll-to-roll method comprises: a substrate supply roll to supply the flexible substrate; a recovery roll to recover the flexible substrate separated from the substrate supply roll, and released from the substrate supply roll; a process unit disposed between the substrate supply roll and the substrate recovery roll to support the flexible substrate, and to process the flexible substrate; and a gas supply unit to supply process gas to the process unit. Therefore, productivity can be improved.
申请公布号 KR20150077112(A) 申请公布日期 2015.07.07
申请号 KR20130166008 申请日期 2013.12.27
申请人 LIGADP CO., LTD. 发明人 SON, HYOUNG KYU
分类号 H01L21/677;B65H26/04 主分类号 H01L21/677
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