摘要 |
The present invention is to provide an apparatus to process a flexible substrate and a method to process the flexible substrate using the same to improve a process speed of the flexible substrate. The apparatus to process the flexible substrate to allow the flexible substrate to be processed in a roll-to-roll method comprises: a substrate supply roll to supply the flexible substrate; a recovery roll to recover the flexible substrate separated from the substrate supply roll, and released from the substrate supply roll; a process unit disposed between the substrate supply roll and the substrate recovery roll to support the flexible substrate, and to process the flexible substrate; and a gas supply unit to supply process gas to the process unit. Therefore, productivity can be improved. |