AMORPHOUS OXIDE, AND PRODUCTION METHOD OF THIN FILM OF ITS ELECTRIDE

摘要

PROBLEM TO BE SOLVED: To provide a method for producing easily a thin film of an electride of an amorphous oxide.SOLUTION: In a production method of a thin film, a thin film of an electride of an amorphous oxide containing calcium atoms and aluminum atoms are formed by depositing on a substrate by a sputtering method under an atmosphere of a low oxygen partial pressure by using a target including a crystalline C12A7 electride.