TANTALUM OXO-ALKOXO COMPLEX, METHOD OF PRODUCING THE SAME, AND METHOD OF MAKING TANTALUM OXIDE FILM

摘要

PROBLEM TO BE SOLVED: To provide a tantalum oxo-alkoxo complex useful as material for film making used in preparing a tantalum oxide film and a method of producing the same.SOLUTION: A novel tantalum oxo-alkoxo complex represented by chemical formula (1) is produced, and the tantalum oxo-alkoxo complex (1) is further mixed with organic solvent to prepare material solution for film making, and the material solution for film making is used to prepare a tantalum oxide film.