发明名称 |
SEMICONDUCTOR DEVICE MANUFACTURING METHOD |
摘要 |
PROBLEM TO BE SOLVED: To provide a manufacturing method of a semiconductor device which can make it harder to cause failure in encapsulation of a semiconductor chip even when positional deviation occurs when an encapsulation sheet is arranged.SOLUTION: A semiconductor device manufacturing method comprises: a process A of preparing a laminate in which a semiconductor chip is fixed on a support medium; a process B of preparing an encapsulation sheet; a process C of arranging the encapsulation sheet on the semiconductor chip of the laminate; and a process D of embedding the semiconductor chip to the encapsulation sheet to form an encapsulated body in which the semiconductor chip is embedded in the encapsulation sheet. A ratio d2/d1 of a distance d1 between two farthest two points on an outer periphery of the support medium in planar view to a distance d2 between the farthest two points on an outer periphery of the encapsulation sheet in planar view is equal to or higher than 1.007. |
申请公布号 |
JP2015126060(A) |
申请公布日期 |
2015.07.06 |
申请号 |
JP20130268690 |
申请日期 |
2013.12.26 |
申请人 |
NITTO DENKO CORP |
发明人 |
SHIGA GOSHI;ISHIZAKA TAKESHI;MORITA KOSUKE;IINO CHIE |
分类号 |
H01L21/56;H01L23/29;H01L23/31 |
主分类号 |
H01L21/56 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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