摘要 |
<p>PROBLEM TO BE SOLVED: To provide an eddy current type displacement sensor having excellent detection accuracy.SOLUTION: An eddy current type displacement sensor 10 includes: an oscillation circuit 12 oscillating a coil 14 which is provided on a plane surface and which is formed by winding a conducting wire in a rectangular shape; a metal plate 17 displaced along long side parts 14a, 14b in a manner not to cover the whole of a space closed by the coil 14; and a CPU 16 detecting a position of the metal plate 17 through a partial pressure of the coil 14.</p> |