| 摘要 |
<p>PROBLEM TO BE SOLVED: To extract a minute sample from a material that tends to react with assist gas or tends to be etched such as a lithium-containing material or a soler material, without using the assist gas.SOLUTION: The present invention relates to adhesively bond a probe capable of extracting a minute sample to the minute sample using ionic liquid in a sample processing method for extracting the minute sample from a sample by irradiating the sample with an ion beam. According to the present invention, it is possible to extract the minute sample from a material that tends to react with assist gas or tends to be etched such as a lithium-containing material or a solder material, without using the assist gas.</p> |
