摘要 |
PROBLEM TO BE SOLVED: To provide a surface analyzer that needs no adjustment of a stop position of a sample base.SOLUTION: A surface analyzer 1 comprises: an analysis room 10 having a housing 11 in which an inside thereof is evacuated and an opening 11a for disposing a sample S at an analysis position is formed; and a sample transfer mechanism 30 having a sample base 31 in which the sample S is placed on a base upper surface thereof, a swing arm 32 in which the sample base 31 is attached to one end thereof, and a rotation drive mechanism 40 for rotating a shaft 34 which is attached to the other end of the swing arm 32. The rotation drive mechanism 40 presses an upper surface of the sample S or the upper surface of the sample base 31 against a lower surface of the housing 11 around the opening 11a by rotating the shaft 34. The rotation drive mechanism 40 is constituted such that use of a pneumatic rotary cylinder 41 allows rotation of the shaft 34. |