发明名称 SEMICONDUCTOR DEIVICES AND METHODS OF MANUFACTURE THEREOF
摘要 Semiconductor devices and methods of manufacture thereof are disclosed. In some embodiments, a semiconductor device includes a first semiconductor chip including a first substrate and a first conductive feature formed over the first substrate, and a second semiconductor chip bonded to the first semiconductor chip. The second semiconductor chip includes a second substrate and a second conductive feature formed over the second substrate. A conductive plug is set through the first conductive feature and is coupled to the second conductive feature. The conductive plug includes a first portion disposed over the first conductive feature, the first portion having a first width, and a second portion set beneath or within the first conductive feature. The second portion has a second width. The first width is greater than the second width.
申请公布号 KR20150076098(A) 申请公布日期 2015.07.06
申请号 KR20140186821 申请日期 2014.12.23
申请人 TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD. 发明人 YAUNG DUN NIAN;LIU JEN CHENG;TSAI SHU TING;CHEN SZU YING;CHEN U TING
分类号 H01L21/28;H01L21/768 主分类号 H01L21/28
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