ULTRAVIOLET CURING RESIN REMOVAL DEVICE AND ULTRAVIOLET CURING RESIN REMOVAL METHOD

摘要

PROBLEM TO BE SOLVED: To provide an ultraviolet curing resin removal device and an ultraviolet curing resin removal method, capable of improving productivity.SOLUTION: The ultraviolet curing resin removal device includes a contact part that brings a first ultraviolet curing resin provided on a surface of a processed product into contact with a sulphuric acid solution. The first ultraviolet curing resin does not include a photoacid generating agent. A sulfuric acid concentration of the sulphuric acid solution is equal to or more than 98 wt.%.