APPARATUS FOR MEASURING PATICLE

摘要

The present invention relates to an apparatus for measuring particles. The apparatus for measuring particles according to the present invention comprises: an inspection area provided in a vacuum state; a particle supply unit to supply particles to be measured introduced thereinto to the inside of the inspection area in a concentrated state; a shape measurement unit disposed on a moving path of the particles to be measured to measure moving time of the concentrated particles to be measured to measure the shape of the concentrated particles to be measured; a light source unit to emit inspection light which is directed towards the concentrated particles to be measured in the inspection area and crosses the moving path of the concentrated particles to be measured; and a measurement unit to use the inspection light passing through the inspection area to measure information about the particles to be measured. Accordingly, the shape of the concentrated particles to be measured discharged from the particle supply unit is measured before the particles to be measured are supplied into the inspection area, and thus the characteristics of the particles to be measured can be more accurately measured.