| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a vacuum pump excellent in the exhaust performance even if an exhaust port and a screw stator oppose each other.SOLUTION: Of the outer circumference of a screw stator 11 of a turbo molecular pump 100, in the region between a position 11b on the side of an intake port 31 from a position 11d opposing the intake port side end part 56a of an exhaust port 56 and a tip 11c, there is formed a taper structure T1 along the whole circumference.</p> |
