| 摘要 |
<p>Disclosed is a purging apparatus to keep a container to store and convey cleanness by separating a main frame, and the cover of the container for storing and conveying, separately purging them, binding them, removing humidity inside the container for storing and conveying; reducing natural oxidation occurring when a substrate is stored and conveyed in the container for storing and conveying; and making the substrate highly integrated with a high production rate. The purging apparatus of the present invention, in a box to purge the container for storing and conveying, comprises: a box to purge the main frame to separately purge the main frame of the container for storing and conveying; and a box for filling to simultaneously purge the main frame and the cover of the container for storing, conveying, and filling with an inert gas.</p> |
