申请人 |
MICRON TECHNOLOGY, INC.;ROHM AND HAAS ELECTRONIC MATERIALS, L.L.C.;DOW GLOBAL TECHNOLOGIES LLC |
发明人 |
BROWN WILLIAM R.;OLSON ADAM;JAIN KAVERI;EOM, HO SEOP;CHEN XUE GLORIA;MIRIN NIK;MILLWARD DAN;TREFONAS PETER III;HUSTAD PHILLIP DENE;PARK, JONG KEUN;LEE CHRISTOPHER NAM |