IMAGE PROCESSING METHOD, IMAGE PROCESSING SYSTEM, AND STORAGE MEDIUM STORING IMAGE PROCESSING PROGRAM

摘要

An image processing method includes a step of acquiring a measured image G1B measured from a semiconductor device S and a first pattern image G2B showing a pattern of the semiconductor device S, a step of acquiring a reference measured image G3B measured from a reference semiconductor device SR being the semiconductor device S or a semiconductor device different from the semiconductor device S and a second pattern image G4B showing a pattern of the reference semiconductor device SR, a step of acquiring matching information indicating a correlation of the first pattern image G2B and the second pattern image G4B, and a step of determining a difference of the measured image G1B and the reference measured image G3B based on the matching information to acquire a comparative image G5B.

主权项

1. A method for acquiring a comparative image of a measured image measured from a semiconductor device and a reference measured image measured from a reference semiconductor device, the method comprising:
acquiring the measured image measured from the semiconductor device and a first pattern image showing a pattern of the semiconductor device corresponding to the measured image; acquiring the reference measured image measured from the reference semiconductor device being the semiconductor device or a semiconductor device different from the semiconductor device and a second pattern image showing a pattern of the reference semiconductor device corresponding to the reference measured image; acquiring matching information indicating a correlation of the first pattern image and the second pattern image based on the first pattern image and the second pattern image; and determining a difference of the measured image and the reference measured image based on the matching information to acquire the comparative image.