| 主权项 |
1. A camera system (C) for viewing, as opposed to providing a beam (B) of electromagnetic radiation to conduct measurements on a surface of a sample (SAM), in functional combination with a reflectometer, ellipsometer, polarimeter or the like system (ES):
wherein said reflectometer, ellipsometer, polarimeter or the like system (ES) comprises:
a) an illuminating source (LS) of a beam of electromagnetic radiation;c) a stage (STG) for supporting a sample;d) a detector (DET); such that in use said illuminating source (LS) of a beam of electromagnetic radiation causes a beam of electromagnetic radiation to interact with a sample (SAM) placed on said stage (STG) and reflect into said detector (DET), such that sample characterizing data is produced thereby, said beam of electromagnetic radiation defining an “X”-“Z” plane in an orthogonal “X”, “Y” and “Z” axis system; and said camera system (C) for monitoring the surface of said sample comprises:
e) a camera sensor plate (CS);f) a focusor (FM); each of said camera sensor plate (CS), focusor (FM) and sample supporting stage (STG) each being oriented in identifiable planes, wherein:
the plane of the camera sensor plate (CS) refers to the orientation of its surface;the plane of the sample supporting stage (STG) refers to the orientation of its surface; andthe plane of the focusor (FM) is perpendicular to its optical axis; such that in use when said camera (C) is positioned to observe a sample placed on said stage for supporting a sample along a camera viewpoint locus (VL), said camera viewpoint locus forms an angle alpha (α) with respect to the plane of said camera sensor plate, and proceeds from said camera sensor plate along a substantial perpendicular to the plane of said focusor and along its optical axis, and such that said camera viewpoint locus further forms an oblique angle of incidence beta (β) with respect to a normal to a surface of said sample, said camera being offset in both “Y”, and “Z” directions from said “X”-“Z” plane; said camera sensor plate (CS), focusor (FM) and stage (STG) for supporting a sample (SAM) being oriented with respect to one another such that a projected perpendicular to the plane of the camera sensor plate, a projected plane of the sample (SAM) surface and a projected plane of the focusor (FM) intersect at a common point, and such that the following condition is substantially met:
Tan(α)=(X−f)/f Tan(β); where “X” is the distance from the camera sensor plate (CS), at the point at which said beam passes therethrough, to a center of said focusor (FM), and “f” is the focal length of said focusor (FM) and where alpha (α) and beta (β) were defined above; such that, in use the camera (C) provides a focused view of the sample (SAM) over the area thereof viewed, while ellipsometric or the like data is acquired at small angles-of-incidence that are unattainable when the camera is present along the “Z” axis where it physically interferes with the positioning of said illuminating source (SAM) of a beam of electromagnetic radiation and said detector; said system further including a contrast developing system comprising:
a camera illumination source (S);a first beam splitter (BS1);at least one reflector (M);a compensating system (C′);a second beam splitter (BS2); such that in use said camera illuminating source (S) directs a beam of electromagnetic radiation at said first beams splitter (BS1), that in turn directs first (B1) and second (B2) beams of electromagnetic radiation exiting therefrom, the first (B1) reflecting from said sample (SAM), and the second beam (B2) at said at least one reflector (M) from which it reflects, such that said first (B1) and second (B2) beams reflected from said sample (SAM) and said at least one reflector (M) respectively, converge onto said second beam splitter (BS2) and interact with each other, to the end that a beam reflected from said second beam splitter (BS2) is directed onto said camera sensor plate (CS), such that said camera sensor plate (CS) is presented with an image forming beam of electromagnetic radiation that presents with increased contrast, as compared to that when said contrast developing system is not present. |
