| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a mask for film deposition with which a film in a desired shape can be formed on a resin base material precisely with good reproducibility, a mask film deposition method, and a method of manufacturing an organic electroluminescent element.SOLUTION: There is provided a mask 1 for film deposition which is used to form a film on a resin base material, and includes a mask body 11 having an opening part 11a and a mask frame 12 supporting the mask body 11. A/C=10 to 18 and B/C=1.3 to 6.5 hold where for the mean coefficient of linear expansion in a temperature of 20-100°C, the mean coefficient of linear expansion of the resin base material is A, the mean coefficient of linear expansion of the mask frame 12 is B, and the mean coefficient of linear expansion of the mask body 11 is C.</p> |
