DISPLAY APPARATUS INCORPORATING CORRUGATED BEAM ACTUATORS

摘要

This disclosure provides systems, methods and apparatus for shutter-based EMS light modulators controlled by electrode actuators that include complementary sets of corrugations or teeth along the opposing beams of the actuators. The complementary sets of corrugations substantially engage one another when drawn together via an actuation voltage. By applying the actuation voltage across the opposing beams of such an actuator, the beams are drawn together both by the electromotive force resulting from the electric field acting between the portions of the beams that are substantially perpendicular to the direction of actuation of the actuator, and by fringing fields between the sides of the corrugations, which are substantially parallel to the direction of actuation. The additional fringing fields provide for increased electromotive force for a given input voltage.

主权项

1. A display apparatus, comprising:
a light obstructing component suspended over a substrate; and an actuator configured to move the light obstructing component in a plane substantially parallel to the substrate, the actuator including:
a first compliant beam electrode coupled to the light obstructing component and having a first primary elongated portion including a first set of corrugations along a length of the first compliant beam electrode, wherein the first compliant beam electrode defines a perimeter of the first set of corrugations; anda second compliant beam electrode positioned adjacent to the first compliant beam electrode, the second compliant beam electrode having a second primary elongated portion including a second set of corrugations, wherein the second compliant beam electrode defines a perimeter of the second set of corrugations, and the first and second sets of corrugations are positioned along the first and second primary elongated portions at positions selected such that when the first and second compliant beam electrodes are drawn together, the first and second sets of corrugations substantially engage one another.