发明名称 FUNCTIONAL DEVICE, ACCELERATION SENSOR, AND SWITCH
摘要 A functional device includes: a substrate; and a movable section configured to be held by the substrate and to be movable along a first direction in a surface of the substrate, in which the movable section includes a plurality of first shaft portions with relatively high rigidity, the plurality of first shaft portions are arranged side by side to extend along the first direction and to be line-symmetric to one another, and protrusions configured to brake the movable section are provided on substantially extended lines of the first shaft portions.
申请公布号 US2015183636(A1) 申请公布日期 2015.07.02
申请号 US201414554478 申请日期 2014.11.26
申请人 Sony Corporation 发明人 Akiba Akira;Hashimoto Mitsuo;Fukuyama Munekatsu
分类号 B81B7/00 主分类号 B81B7/00
代理机构 代理人
主权项 1. A functional device comprising: a substrate; and a movable section configured to be held by the substrate and to be movable along a first direction in a surface of the substrate, wherein the movable section includes a plurality of first shaft portions with relatively high rigidity, the plurality of first shaft portions are arranged side by side to extend along the first direction and to be line-symmetric to one another, and protrusions configured to brake the movable section are provided on substantially extended lines of the first shaft portions.
地址 Tokyo JP