主权项 |
1. An apparatus for testing integrated circuits, comprising:
a test probe having test contacts configured to be pressed onto electrical contacts of a substrate, a frame to which the test probe is attached, a substrate support configured to hold the substrate, and a magnetic element configured to generate a force with which the test contacts are pressed onto the electrical contacts of the integrated circuit, the magnetic element including at least three magnet actuators which each have a distance sensor associated therewith and which are arranged around the substrate support such that distances between the magnet actuators and the frame, and between the substrate support and the test probe, are adjustable. |