MICRO-ELECTRO MECHANICAL APPARATUS WITH PN-JUNCTION

摘要

A micro-electro mechanical apparatus having a PN-junction is provided. The micro-electro mechanical apparatus includes a movable mass, a conductive layer, and an electrode. The movable mass includes a P-type semiconductor layer and an N-type semiconductor layer. The PN-junction is formed between the P-type semiconductor layer and the N-type semiconductor layer. The micro-electro mechanical apparatus is capable of eliminating abnormal voltage signal when an alternating current passes through the conductive layer. The micro-electro mechanical apparatus is adapted to measure acceleration and magnetic field. The micro-electro mechanical apparatus can be other types of micro-electro mechanical apparatus such as micro-electro mechanical scanning micro-mirror.

主权项

1. A micro-electro mechanical apparatus, comprising:
a substrate including an electrode disposed on a top surface of the substrate; a movable mass, being disposed above the electrode, including:
a first P-type semiconductor layer;a first N-type semiconductor layer connected to the first P-type semiconductor layer;a first PN-junction formed between the first P-type semiconductor layer and the first N-type semiconductor layer; a first conductive layer; and a first electrical insulation layer disposed between the movable mass and the first conductive layer.