发明名称 ELECTROMAGNETIC WAVE DETECTOR
摘要 PROBLEM TO BE SOLVED: To provide an electromagnetic wave detector capable of highly efficiently absorbing wavelengths of other wide wavelength bands excepting for a desired wavelength.SOLUTION: The electromagnetic wave detector which converts an electromagnetic wave into an electric signal and detects the electric signal includes: a structure including a lower metal layer, an insulation layer formed on the lower metal layer and an upper layer metal pattern with which a plurality of upper metal layers are disposed on the insulation layer; and a signal detection part which detects a temperature change of the structure by converting it into an electric signal. The upper layer metal pattern includes at least two kinds of upper metal layers of which the shape is determined so as to absorb electromagnetic waves of a specific wavelength through surface plasmon resonance with the electromagnetic waves of the specific wavelength, and between absorption wavelengths of two electromagnetic waves absorbed by the upper metal layer, the insulation layer and the upper layer metal pattern, a non-absorption wavelength band of non-absorbed electromagnetic waves is included.
申请公布号 JP2015121417(A) 申请公布日期 2015.07.02
申请号 JP20130263930 申请日期 2013.12.20
申请人 MITSUBISHI ELECTRIC CORP 发明人 MAEKAWA MICHIHIRO;OGAWA SHINPEI;FUJISAWA DAISUKE
分类号 G01J3/18;G01J1/02;H01L27/14;H01L27/144 主分类号 G01J3/18
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