SUBSTRATE PROCESSING MODULE, SUBSTRATE PROCESSING APPARATUS INCLUDING THE SAME, AND SUBSTRATE TRANSFERRING METHOD

摘要

PROBLEM TO BE SOLVED: To provide a substrate processing module, a substrate processing apparatus including the substrate processing module, and a substrate transferring method.SOLUTION: According to the present invention, there is provided a substrate processing module including: a chamber 120 in which a passage 130 allowing a substrate to enter or exit therethrough is formed on one side thereof; a first susceptor 141 disposed within the chamber 120, having at least one through hole formed in an upper surface thereof in a penetrating manner, and allowing the substrate to be placed thereon; a second susceptor 142 disposed within the chamber 120 and allowing the substrate to be placed thereon; a rotary member provided within the chamber 120 and rotatable based on a preset position; a holder 150 connected to the rotary member and having a mounting surface allowing the substrate to be placed thereon; and a holder driving module driving the rotary member to move the holder 150 to a standby position corresponding to the first susceptor 141 or to a transfer position corresponding to the second susceptor 142.