发明名称 SEMICONDUCTOR ARRANGEMENT WITH CAPACITOR AND METHOD OF FABRICATING THE SAME
摘要 A semiconductor arrangement includes an active region including a semiconductor device. The semiconductor arrangement includes a capacitor. The capacitor includes a first electrode over at least one dielectric layer over the active region. The first electrode surrounds an open space within the capacitor. The first electrode has a non-linear first electrode sidewall.
申请公布号 US2015187777(A1) 申请公布日期 2015.07.02
申请号 US201314144676 申请日期 2013.12.31
申请人 Taiwan Semiconductor Manufacturing Company Limited 发明人 Hsu Chern-Yow;Liu Ming Chyi;Liu Shih-Chang;Tsai Chia-Shiung;Chen Xiaomeng;Wang Chen-Jong
分类号 H01L27/108 主分类号 H01L27/108
代理机构 代理人
主权项 1. A semiconductor arrangement comprising: an active region comprising a semiconductor device; and a capacitor comprising a first electrode over at least one dielectric layer over the active region, wherein the first electrode surrounds an open space within the capacitor.
地址 Hsin-Chu TW