ABRASIVE, ABRASIVE SET, AND METHOD FOR POLISHING SUBSTRATE

摘要

An abrasive which comprises a liquid medium, abrasive grains including a hydroxide of a tetravalent metallic element, a first additive, a second additive, and a third additive, wherein the first additive is at least one type selected from the group consisting of a compound having a polyoxyalkylene chain and a vinyl alcohol polymer, the second additive is a cationic polymer, and the third additive is an amino group-containing sulfonic acid compound.