METHODS AND APPARATUS TOWARD PREVENTING ESC BONDING ADHESIVE EROSION

摘要

Embodiments of the present invention provide chamber components having a protective element for shielding bonding material from processing environments in a processing environment. The protective element may include protective seals, protective structures, erosion resistive filers, or combinations thereof. Embodiments of the present invention reduce erosion of bonding material used in a processing chamber, thus, improving processing quality and reducing maintenance costs.

主权项

1. An apparatus use in a processing chamber, comprising:
a first component having a first surface; a second component having a second surface, wherein the second surface faces the first surface of the first component; a bonding material disposed between the first surface and the second surface and joining the first component and the second component; and a protective element disposed for preventing the bonding material from erosion in the processing chamber, wherein the protective element comprising a silicon filler disposed in the bonding material.