| 摘要 |
An end-block (100, 101) and a deposition apparatus (200) including an end-block (100, 01) are provided. The end-block (100, 101) includes a base body (110) which is adapted to be connected to the deposition apparatus (200) in a non-rotational manner. The end-block (100, 101) further includes a rotary bearing (140, 141) arranged around the base body (110) and a rotor (120) which is arranged around the rotary bearing (140, 41) and adapted to receive a rotatable target (10). |
